Title :
On-Chip Microwave Filters on Standard Silicon Substrate Incorporating a Low-k BCB Dielectric Layer
Author :
Lydia L. W. Leung;Kevin J. Chen;Xiao Huo;Philip C. H. Chan
Author_Institution :
Department of Electrical and Electronic Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Hong Kong. eelydia@ee.ust.hk, Tel.: +852-2358-7082, Fax: +852-2358-1485
Abstract :
A low-loss, low-pass microstrip transmission line based microwave filter using 6-?m low-k dielectric, Benzocyclobutene (BCB), as an interface layer has been fabricated on a standard CMOS grade silicon substrate. Standard 50-Ohm microstrip lines were fabricated and exhibit lower loss compared with the microtrip line on silicon without the BCB layer. The filter has a cut-off frequency at 10 GHz with an insertion loss of 1.1 dB. Simulation and measurement results of the filter are provided. Full-wave analysis of a 10 GHz bandpass filter is shown as well.
Keywords :
"Dielectric substrates","Microwave filters","Silicon","Copper","Band pass filters","Dielectric losses","Microstrip filters","Radio frequency","Microwave theory and techniques","Fabrication"
Conference_Titel :
Microwave Conference, 2002. 32nd European
DOI :
10.1109/EUMA.2002.339215
