Title :
Modeling and Co-Simulation of Integrated Microand Nanosystems
Author :
P. Janus;T. Bieniek;A. Kociubinski;P. Grabiec;G. Schopfer
Author_Institution :
The Division of Silicon Microsystem and Nanostructure Technology, Warsaw Institute of Electron Technology. janus@ite.waw.pl
fDate :
6/1/2007 12:00:00 AM
Abstract :
In this paper we present a system-level, top-down design/modeling methods for microsystem (MEMS) devices. We describe advanced process co-simulation/emulation of MEMS and integrated circuits. The methodology of hardware-in-the-loop basing on co-simulation of MEMS and IC using signal flow simulators is also discussed.
Keywords :
"Micromechanical devices","Circuit simulation","Mathematical model","Packaging","Integrated circuit modeling","Hardware","Process design","Analytical models","Three-term control","Computational modeling"
Conference_Titel :
Mixed Design of Integrated Circuits and Systems, 2007. MIXDES ´07. 14th International Conference on
Print_ISBN :
83-922632-4-3
DOI :
10.1109/MIXDES.2007.4286200
