DocumentCode
3626009
Title
Evaporative Printing of Organic Materials at Ambient Pressure using a Micromachined Printhead
Author
Valerie Leblanc;Jianglong Chen;Peter Mardilovich;Vladimir Bulovic;Martin A. Schmidt
Author_Institution
Massachusetts Institute of Technology, Cambridge, MA, USA. Tel: +00-1-617-253-0031
fYear
2007
fDate
6/1/2007 12:00:00 AM
Firstpage
121
Lastpage
124
Abstract
We present a MEMS-enabled technique for evaporative printing of organic materials which doesn´t require a vacuum ambient, has a fast printing rate (1 kHz), and can be scaled up to an array of individually addressable nozzles. By depositing the materials directly from the gas phase, without liquid phase coming in contact with the substrate, we aim at avoiding the limitations encountered when ink-jet printing organic materials. The MEMS printhead comports an array of 2 micron pores and an integrated thin film platinum heater on a silicon membrane for local evaporation of the materials. This printhead was used, together with ink-jet technology for the delivery of material to the pores, to print molecular organic semiconductors. Our technique enables printing of organic optoelectronics over large areas, and is thus a critical element in the realization of large-area, high-speed, and low-cost printing of optoelectronics.
Keywords
"Organic materials","Semiconductor materials","Vacuum technology","Substrates","Ink jet printing","Micromechanical devices","Semiconductor thin films","Platinum","Silicon","Biomembranes"
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
ISSN
2159-547X
Print_ISBN
1-4244-0841-5
Electronic_ISBN
2164-1641
Type
conf
DOI
10.1109/SENSOR.2007.4300086
Filename
4300086
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