Title :
A high efficiency silicon nitride grating coupler
Author :
L. Vivien;G. Maire;G. Sattler;D. Marris-Morini;E. Cassan;S. Laval;A. Kazmierczak;D. Giannone;B. Sanchez;A. Griol;D. Hill;K.B. Gylfason;H. Sohlstrom
Author_Institution :
Institut d´Electronique Fondamentale, CNRS UMR 8622, B?t. 220, Universit? Paris-sud XI, F-91405 ORSAY, cedex ? France
Abstract :
The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from lambda = 1.25 to 1.45 mum for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.
Keywords :
"Silicon","Gratings","Optical coupling","Etching","Tellurium","Photonics","Resonance","Electromagnetic waveguides","Coatings","Nanophotonics"
Conference_Titel :
Group IV Photonics, 2007 4th IEEE International Conference on
Print_ISBN :
978-1-4244-0934-1
Electronic_ISBN :
1949-209X
DOI :
10.1109/GROUP4.2007.4347702
