• DocumentCode
    3626235
  • Title

    A high efficiency silicon nitride grating coupler

  • Author

    L. Vivien;G. Maire;G. Sattler;D. Marris-Morini;E. Cassan;S. Laval;A. Kazmierczak;D. Giannone;B. Sanchez;A. Griol;D. Hill;K.B. Gylfason;H. Sohlstrom

  • Author_Institution
    Institut d´Electronique Fondamentale, CNRS UMR 8622, B?t. 220, Universit? Paris-sud XI, F-91405 ORSAY, cedex ? France
  • fYear
    2007
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from lambda = 1.25 to 1.45 mum for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.
  • Keywords
    "Silicon","Gratings","Optical coupling","Etching","Tellurium","Photonics","Resonance","Electromagnetic waveguides","Coatings","Nanophotonics"
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2007 4th IEEE International Conference on
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4244-0934-1
  • Electronic_ISBN
    1949-209X
  • Type

    conf

  • DOI
    10.1109/GROUP4.2007.4347702
  • Filename
    4347702