DocumentCode :
3627238
Title :
[Copyright notice]
fYear :
2008
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443577
Filename :
4443577
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3627238
