DocumentCode
3627384
Title
Concave Low-Loss Total Internal Reflection Mirrors in Indium Phosphide for High Fabrication Tolerance
Author
Joseph A. Summers;Vikrant Lal;Milan L. Masanovic;Nadir Dagli;Daniel J. Blumenthal
Author_Institution
Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106-9560, USA. jsummers@ece.ucsb.edu
fYear
2007
fDate
5/1/2007 12:00:00 AM
Firstpage
1
Lastpage
2
Abstract
We report on a novel concave total internal reflection mirror fabricated in InP that allows larger mirror size and mask alignment tolerance. Average mirror loss measured was 0.56dB/mirror with a standard deviation of 0.14 dB/mirror.
Keywords
"Mirrors","Indium phosphide","Fabrication","Optical waveguides","Etching","Optical reflection","Optical surface waves","Optical losses","Loss measurement","Photonic integrated circuits"
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Electronic_ISBN
2160-9004
Type
conf
DOI
10.1109/CLEO.2007.4452996
Filename
4452996
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