• DocumentCode
    3627384
  • Title

    Concave Low-Loss Total Internal Reflection Mirrors in Indium Phosphide for High Fabrication Tolerance

  • Author

    Joseph A. Summers;Vikrant Lal;Milan L. Masanovic;Nadir Dagli;Daniel J. Blumenthal

  • Author_Institution
    Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106-9560, USA. jsummers@ece.ucsb.edu
  • fYear
    2007
  • fDate
    5/1/2007 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report on a novel concave total internal reflection mirror fabricated in InP that allows larger mirror size and mask alignment tolerance. Average mirror loss measured was 0.56dB/mirror with a standard deviation of 0.14 dB/mirror.
  • Keywords
    "Mirrors","Indium phosphide","Fabrication","Optical waveguides","Etching","Optical reflection","Optical surface waves","Optical losses","Loss measurement","Photonic integrated circuits"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Electronic_ISBN
    2160-9004
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452996
  • Filename
    4452996