Title :
Concave Low-Loss Total Internal Reflection Mirrors in Indium Phosphide for High Fabrication Tolerance
Author :
Joseph A. Summers;Vikrant Lal;Milan L. Masanovic;Nadir Dagli;Daniel J. Blumenthal
Author_Institution :
Department of Electrical and Computer Engineering, University of California, Santa Barbara, CA 93106-9560, USA. jsummers@ece.ucsb.edu
fDate :
5/1/2007 12:00:00 AM
Abstract :
We report on a novel concave total internal reflection mirror fabricated in InP that allows larger mirror size and mask alignment tolerance. Average mirror loss measured was 0.56dB/mirror with a standard deviation of 0.14 dB/mirror.
Keywords :
"Mirrors","Indium phosphide","Fabrication","Optical waveguides","Etching","Optical reflection","Optical surface waves","Optical losses","Loss measurement","Photonic integrated circuits"
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Electronic_ISBN :
2160-9004
DOI :
10.1109/CLEO.2007.4452996
