• DocumentCode
    3627589
  • Title

    A 4Kb CMOS/SIMOX SRAM

  • Author

    Yasuhisa Omura;Sadao Nakashima;Katsutoshi Izumi

  • Author_Institution
    Atsugi Electrical Communication Laboratory, NTT 1839 Ono, Atsugi-shi, Kanagawa Pref. 243-01, Japan
  • fYear
    1985
  • fDate
    5/1/1985 12:00:00 AM
  • Firstpage
    24
  • Lastpage
    25
  • Keywords
    "Random access memory","MOSFETs","Silicon on insulator technology","CMOS technology","Substrates","Annealing","Metallization","Laboratories","Oxygen","Ion sources"
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1985. Digest of Technical Papers. Symposium on
  • Print_ISBN
    4-930813-09-3
  • Type

    conf

  • Filename
    4480285
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3627589