• DocumentCode
    3627591
  • Title

    SIMOX Technology for CMOS LSIs

  • Author

    Katsutoshi Izumi;Yasuhisa Omura;Masayuki Ishikawa;Eiichi Sano

  • Author_Institution
    Musashino Electrical Communication Laboratory, N.T.T. Musashino-shi, Tokyo 180, Japan
  • fYear
    1982
  • fDate
    9/1/1982 12:00:00 AM
  • Firstpage
    10
  • Lastpage
    11
  • Keywords
    "CMOS technology","FETs","CMOS process","Delay","Silicon","Read-write memory","Phase locked loops","Fabrication","Circuits","Dry etching"
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1982. Digest of Technical Papers. Symposium on
  • Type

    conf

  • Filename
    4480554
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3627591