• DocumentCode
    3627821
  • Title

    The Fabrication Process of RF Inductor Structures in the LTCC Technology

  • Author

    G. Radosavljevic;A. Maric;G. Stojanovic;Lj. Zivanov;W. Smetana;M. Unger;H. Homolka

  • Author_Institution
    Faculty of Technical Sciences, University of Novi Sad, Trg Dositeja Obradovi?a 6, Novi Sad, Serbia. E-mail: rgoran@uns.ns.ac.yu
  • Volume
    1
  • fYear
    2007
  • Firstpage
    249
  • Lastpage
    252
  • Abstract
    This paper introduces the LTCC as a novel technology for the fabrication of multilayer microelectronic components. Advantages of the multilayer structure will be presented on the example of the 3D inductor.
  • Keywords
    "Fabrication","Radio frequency","Inductors","Nonhomogeneous media","Conducting materials","Microelectronics","Temperature","Optical design","Ceramics","Firing"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2007. CAS 2007. International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-0847-4
  • Electronic_ISBN
    2377-0678
  • Type

    conf

  • DOI
    10.1109/SMICND.2007.4519693
  • Filename
    4519693