DocumentCode
3631298
Title
Fast neutron irradiation induced clusters in silicon-single-crystals, using X-ray diffraction
Author
E. Halmagean;O. Birau;A. Ciuhandu;M. Udrea-Spenea
Author_Institution
Res. Inst. for Electron. Components, Bucharest, Romania
fYear
1995
Firstpage
195
Lastpage
198
Abstract
Clusters induced as effects of exposing silicon single-crystals in fast neutron reactor ambiant are studied as a damage phenomenon used in inducing well controlled and reproducible effects to be used in semiconductor materials and device technology. Single-silicon-crystal X-ray diffraction has become a well-established branch of X-ray crystallography. Widely used as a method of investigation of bulk structural properties, it can also be used as a powerful tool in revealing by visualization silicon crystal lattice defects such as fast neutron reactor irradiation induced clusters. This paper is an original contribution in this field using X-ray topography as an investigation tool.
Keywords
"Neutrons","X-ray diffraction","X-ray imaging","Surfaces","Silicon","Inductors","Lattices","Optical imaging","Annealing","Electronic components"
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1995. CAS´95 Proceedings., 1995 International
Print_ISBN
0-7803-2647-4
Type
conf
DOI
10.1109/SMICND.1995.494896
Filename
494896
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