Title : 
Fast neutron irradiation induced clusters in silicon-single-crystals, using X-ray diffraction
         
        
            Author : 
E. Halmagean;O. Birau;A. Ciuhandu;M. Udrea-Spenea
         
        
            Author_Institution : 
Res. Inst. for Electron. Components, Bucharest, Romania
         
        
        
        
        
            Abstract : 
Clusters induced as effects of exposing silicon single-crystals in fast neutron reactor ambiant are studied as a damage phenomenon used in inducing well controlled and reproducible effects to be used in semiconductor materials and device technology. Single-silicon-crystal X-ray diffraction has become a well-established branch of X-ray crystallography. Widely used as a method of investigation of bulk structural properties, it can also be used as a powerful tool in revealing by visualization silicon crystal lattice defects such as fast neutron reactor irradiation induced clusters. This paper is an original contribution in this field using X-ray topography as an investigation tool.
         
        
            Keywords : 
"Neutrons","X-ray diffraction","X-ray imaging","Surfaces","Silicon","Inductors","Lattices","Optical imaging","Annealing","Electronic components"
         
        
        
            Conference_Titel : 
Semiconductor Conference, 1995. CAS´95 Proceedings., 1995 International
         
        
            Print_ISBN : 
0-7803-2647-4
         
        
        
            DOI : 
10.1109/SMICND.1995.494896