• DocumentCode
    3631298
  • Title

    Fast neutron irradiation induced clusters in silicon-single-crystals, using X-ray diffraction

  • Author

    E. Halmagean;O. Birau;A. Ciuhandu;M. Udrea-Spenea

  • Author_Institution
    Res. Inst. for Electron. Components, Bucharest, Romania
  • fYear
    1995
  • Firstpage
    195
  • Lastpage
    198
  • Abstract
    Clusters induced as effects of exposing silicon single-crystals in fast neutron reactor ambiant are studied as a damage phenomenon used in inducing well controlled and reproducible effects to be used in semiconductor materials and device technology. Single-silicon-crystal X-ray diffraction has become a well-established branch of X-ray crystallography. Widely used as a method of investigation of bulk structural properties, it can also be used as a powerful tool in revealing by visualization silicon crystal lattice defects such as fast neutron reactor irradiation induced clusters. This paper is an original contribution in this field using X-ray topography as an investigation tool.
  • Keywords
    "Neutrons","X-ray diffraction","X-ray imaging","Surfaces","Silicon","Inductors","Lattices","Optical imaging","Annealing","Electronic components"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1995. CAS´95 Proceedings., 1995 International
  • Print_ISBN
    0-7803-2647-4
  • Type

    conf

  • DOI
    10.1109/SMICND.1995.494896
  • Filename
    494896