Title :
The effects of upper electrode on the dielectric loss tangent of a capacitive-type humidity sensor
Author :
C. Roman;O. Bodea;N. Santa;N. Prodan;A. Levi;E. Cordos
Author_Institution :
Res. Center for Anal. Instrum., Cluj-Napoca, Romania
Abstract :
The capacitive-type humidity sensor were prepared using poly(methyl methacrylate) (PMMA) as the sensing material and three kinds of metals for the upper electrode: chromium, gold and aluminum. The effect of the upper electrode on the dielectric loss tangent was examined. It was proposed a sensing mechanism which can explain the dielectric behavior.
Keywords :
"Dielectric losses","Electrodes","Humidity","Capacitive sensors","Dielectric loss measurement","Polymers","Inorganic materials","Atomic layer deposition","Dielectric materials","Gold"
Conference_Titel :
Semiconductor Conference, 1995. CAS´95 Proceedings., 1995 International
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495065
