Title :
Glow-to-arc transition instability sensor in processing plasma
Author :
M. Zlatanovic;B. Tesic;D. Nojkovic
Author_Institution :
Fac. of Electr. Eng., Belgrade Univ., Serbia
Abstract :
In this paper an arc quenching unit for a plasma nitriding process is described. It consists of glow-to-arc transition sensor and a parallel thyristor switching circuit.
Keywords :
"Plasma materials processing","Surface discharges","Switching circuits","Glow discharges","Electrodes","Frequency","Sensor phenomena and characterization","Thyristors","Stochastic processes","Cathodes"
Conference_Titel :
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Print_ISBN :
0-7803-2786-1
DOI :
10.1109/ICMEL.1995.500935
