Title :
Novel application of quantum well intermixing implant buffer layer to enable high-density photonic integrated circuits in InP
Author :
Steven C. Nicholes;Milan L. Masanovic;Jonathon Barton;Erik J. Norberg;Erica Lively;Biljana Jevremovic;Larry A. Coldren;Daniel J. Blumenthal
Author_Institution :
Department of Materials, University of California, Santa Barbara 93106, USA
Abstract :
We demonstrate a novel technique for free-carrier absorption reduction using an InP buffer layer with quantum well intermixing. Application of this technique enabled fabrication of monolithic tunable optical routers with more than 200 functions.
Keywords :
"Implants","Buffer layers","Photonic integrated circuits","Indium phosphide","Optical waveguides","Optical wavelength conversion","Optical buffering","Optical attenuators","Optical interferometry","Fabrication"
Conference_Titel :
Indium Phosphide & Related Materials, 2009. IPRM ´09. IEEE International Conference on
Print_ISBN :
978-1-4244-3432-9
DOI :
10.1109/ICIPRM.2009.5012486
