Title :
Parameters governing the sensor characteristic of capacitive temperature sensors built up in LTCC-technology
Author :
M. Unger;G. Radosavljevic;W. Smetana;L. Zivanov;T. Koch
Author_Institution :
Institute of Sensor- and Actuatorsystems, Vienna University of Technology, Austria
Abstract :
The material properties (TCE, dielectric number, etc.) of different LTCC (Low Temperature Co-fired Ceramics) — tape materials were characterized separately and compared to the behavior of combinations of these tapes that were laminated and co-fired. The effects of different values of thermal expansion and change in dielectric number of the combined material stacks have been investigated by finite element analyses and verified using a wireless readout resonant temperature sensor as a demonstration device..
Keywords :
"Temperature sensors","Capacitive sensors","Sensor phenomena and characterization","Dielectric materials","Material properties","Ceramics","Thermal expansion","Dielectric devices","Finite element methods","Wireless sensor networks"
Conference_Titel :
Electronics Technology, 2009. ISSE 2009. 32nd International Spring Seminar on
Print_ISBN :
978-1-4244-4260-7
Electronic_ISBN :
2161-2064
DOI :
10.1109/ISSE.2009.5207056
