• DocumentCode
    3633198
  • Title

    ESD in cleanrooms

  • Author

    Tom Albano

  • Author_Institution
    Eastman Kodak Company, USA
  • fYear
    2002
  • Firstpage
    1
  • Lastpage
    1
  • Keywords
    "Electrostatic discharge","Industrial control","Manufacturing industries","Control equipment","Electromagnetic interference","Contamination"
  • Publisher
    ieee
  • Conference_Titel
    2002 Electrical Overstress/Electrostatic Discharge Symposium, 2002. EOS/ESD ´02.
  • Type

    conf

  • Filename
    5266990