Vertical and horizontal magnetic force sensor and application of sensor in power devices

Vertical and horizontal current sensors based on magnetic force sensing are presented. The proposed sensors are to be used for switched current testing in power devices with high switched currents above amperes. Novel vertical magnetic sensing structures present the advantage of elimination of the undesired voltage reduction and compatibility with the power device control electronics. Various modifications of magnetic sensors architectures, designs and physical implementations on chip are presented. Several sensor versions were designed in 1.0 μm BiCMOS technology.