Title :
Behavior of various geometry MagFET structures
Author :
Martin Daricek;Martin Donoval;Alexander Satka
Author_Institution :
Department of Microelectronics Faculty of Electrical Engineering and Information Technology, STU Bratislava, Slovakia
Abstract :
This paper deal with characterization of various MagFET structures in alternating magnetic field in frequency range from 20 Hz to 5 kHz. 2D numerical simulation of MagFET structures has been used to investigate current density distribution and influence of MagFET geometry to the external magnetic field sensitivity. Rectangle- and sectorial-shaped structures of various dimensions were designed and fabricated in standard 1μm two metal CMOS technology. Fabricated MagFET devices were characterized for applications as a sensor of external magnetic fields. The measurement results show dependence of MagFETs external magnetic field sensitivity on structure geometry, dimensions and biasing conditions.
Keywords :
"Magnetic fields","Magnetic sensors","Magnetic field measurement","CMOS technology","Intelligent sensors","Shape","Information geometry","Current density","Sensor phenomena and characterization","Sensor systems and applications"
Conference_Titel :
Circuit Theory and Design, 2009. ECCTD 2009. European Conference on
DOI :
10.1109/ECCTD.2009.5275146
