Organic materials for humidity sensors

This paper deals with research and development of organic humidity sensors. These sensors are based on gold interdigital electrodes placed on the glass substrate covered by the thin layer of organic sensitive material. The sulfonated aluminium phtalocyanine was used as the prospective sensitive material. The advantage of organic sensitive materials instead of inorganic is the easier deposition of thin films, their higher modifiability and lower cost. Electrical parameters of organic sensors were measured at variable relative humidity and temperature. The influence of aging and frequency behaviour was also measured in detail.