DocumentCode :
3633682
Title :
Planar circuits for non-contact near-field microwave probing
Author :
Jonathan D. Chisum;Mabel Ramirez-Velez;Zoya Popovic
Author_Institution :
Department of Electrical and Computer Engineering, University of Colorado at Boulder, Boulder, CO 80309, USA
fYear :
2009
Firstpage :
802
Lastpage :
805
Abstract :
This paper presents a planar microwave probe circuit for non-contact near-field probing of quasi-planar structures which can be made of metal, dielectric or semiconductor. The probe circuit demonstrated here consists of a high-Q resonator in the range between 900 MHz and 5GHz hybridly integrated with a microstrip circuit and field-concentrating micro-meter size probe tip which determines the spatial resolution of the detection process. The design of the probe circuit and measurement system are presented, along with measurements of a GaAs test circuit and a Si CMOS chip. By scanning the probe above a quasi-planar sample, two-dimensional data sets of complex S-parameters are obtained and appropriate processing is applied to extract information about the sample.
Keywords :
"Microwave circuits","Probes","Semiconductor device measurement","Integrated circuit measurements","Circuit testing","Microstrip resonators","Spatial resolution","Process design","Dielectric measurements","Gallium arsenide"
Publisher :
ieee
Conference_Titel :
Microwave Conference, 2009. EuMC 2009. European
Print_ISBN :
978-1-4244-4748-0
Type :
conf
Filename :
5295982
Link To Document :
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