Title :
Photonic integration in a commercial scaled bulk-CMOS process
Author :
J. S. Orcutt;A. Khilo;M. A. Popovic;C. W. Holzwarth;H. Li;J. Sun;B. Moss;M. S. Dahlem;E. P. Ippen;J. L. Hoyt;V. Stojanovic;F. X. Kartner;H. I. Smith;R. J. Ram
Author_Institution :
Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139
Abstract :
We demonstrate the first photonic chip designed for a commercial bulk CMOS process (65 nm-node) using standard process layers combined with post-processing, enabling dense photonic integration with high-performance microprocessor electronics.
Keywords :
"Optical waveguides","Photonic integrated circuits","CMOS process","Silicon","Integrated circuit interconnections","Optical losses","Microprocessors","Optical resonators","Optical filters","Testing"
Conference_Titel :
Photonics in Switching, 2009. PS ´09. International Conference on
Print_ISBN :
978-1-4244-3857-0
Electronic_ISBN :
2155-8515
DOI :
10.1109/PS.2009.5307769
