DocumentCode :
3634763
Title :
Humidity sensor using leaky surface acoustic waves in YX-LiTaO3 with nanostructured porphyrin film
Author :
Romualdas Rimeika;Daumantas Ciplys;Vilius Poderys;Ricardas Rotomskis;Michael S. Shur
Author_Institution :
Department of Radiophysics and Vilnius University, 10222, Lithuania
fYear :
2009
Firstpage :
1753
Lastpage :
1757
Abstract :
We report on fast sensing of air humidity using the leaky surface acoustic wave (LSAW) propagation in YX-LiTaO3 with hematoporphyrin (Hp) nanostructured film. Effect of humidity on transmission characteristics of the Hp-LiTaO3 two-port SAW delay line was investigated using RF network analyzer. Both the amplitude and phase of transmitted signal become strongly dependent on humidity if the Hp film is located at the reflection points of the obliquely propagating bulk acoustic wave radiated by LSAW. Typically, the transmission loss increases and the phase decreases with increasing humidity. However, for certain sample configurations, we observed the phase increase with increasing humidity. The sensor exhibits very fast response on the order of 0.25 s to abrupt humidity variations. Employment of LSAWs enabled us to implement a novel sensor configuration with separated SAW excitation/detection and sensing surfaces, which is especially promising for use with liquids and aggressive media.
Keywords :
"Humidity","Acoustic sensors","Surface acoustic waves","Acoustic waves","Acoustic propagation","Optical films","Sensor phenomena and characterization","Delay lines","Radio frequency","Acoustic reflection"
Publisher :
ieee
Conference_Titel :
Sensors, 2009 IEEE
ISSN :
1930-0395
Print_ISBN :
978-1-4244-4548-6
Type :
conf
DOI :
10.1109/ICSENS.2009.5398474
Filename :
5398474
Link To Document :
بازگشت