• DocumentCode
    3635144
  • Title

    SAW transduction technique for GaAs microelectronics compatible acoustoelectronic devices

  • Author

    R. Miskinis;P. Rutkowski

  • Author_Institution
    Institute of Semiconductor Physics, A.Go?stauto 11, 2600 Vilnius, Lithuania
  • fYear
    1993
  • Firstpage
    663
  • Lastpage
    666
  • Abstract
    Performance of the surface acoustic wave (SAW) interdigital transducer (IDT) with doubled Al electrodes fabricated on GaAs wafers with submicrometre n-GaAs epitaxial layers has been investigated. Novel modes of linear as well as nonlinear operation of the transducer has been observed. The operation of electronic controllable SAW devices has been demonstrated which confirms possibility of creation of complex integrated circuits with acoustic and electron devices.
  • Keywords
    "Surface acoustic waves","Gallium arsenide","Microelectronics","Surface acoustic wave devices","Acoustic transducers","Acoustic waves","Electrodes","Epitaxial layers","Acoustic devices","Electron devices"
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1993. ESSDERC ´93. 23rd European
  • Print_ISBN
    2-86332-135-8
  • Type

    conf

  • Filename
    5435584
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3635144