Title :
Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
Author :
D. Randjelovi?;C. Tsamis;G. Kaltsas;A. Petropoulos;?. Lazi?
Author_Institution :
IHTM-IMTM University of Belgrade, Njego?eva 12, 11000 Belgrade, Serbia
fDate :
5/1/2010 12:00:00 AM
Abstract :
In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.
Keywords :
"Micromechanical devices","Thermal sensors","Analytical models","Thermoelectricity","Numerical models","Temperature sensors","Biosensors","Voltage","Electronic mail","Software packages"
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Print_ISBN :
978-1-4244-7200-0
DOI :
10.1109/MIEL.2010.5490495
