Title :
Micro force sensor fabricated in the LTCC technology
Author :
G. Radosavljević;W. Smetana;A. Marić;Lj. Živanov;M. Unger;G. Stojanović
Author_Institution :
Department of Electronics, Faculty of Technical Sciences University of Novi Sad, Trg Dositeja Obradovica 6, 21000 Novi Sad, Serbia
fDate :
5/1/2010 12:00:00 AM
Abstract :
This paper presents resonant force sensor designed for the operation in the MHz range and for 0 to 6 N load. The LTCC technology is implemented for the sensor fabrication and a wireless readout of the measured data is provided. Used LTCC tape is characterised in order to demonstrate its mechanical and electrical properties at room temperature. Also, theoretical model of the sensor is developed to predict its behaviour. Fabricated sensor performance is experimentally characterised and obtained results are in good agreement with the ones derived from the presented theoretical model.
Keywords :
"Force sensors","Mechanical sensors","Capacitive sensors","Sensor phenomena and characterization","Resonance","Biomedical measurements","Temperature sensors","Resonant frequency","Wireless sensor networks","Mechanical factors"
Conference_Titel :
Microelectronics Proceedings (MIEL), 2010 27th International Conference on
Print_ISBN :
978-1-4244-7200-0
DOI :
10.1109/MIEL.2010.5490496
