FE modeling of capacitive pressure sensors realized in LTCC technology

Although the pressure sensor market is dominated by silicon based sensors, in recent years ceramic based sensors have proved interesting and have been increasingly researched due to their material properties which qualify them for use in harsh environments. This paper describes the use of finite element analysis (FEA) to determine the functioning of a diaphragm-type ceramic capacitive pressure sensor starting from mechanical pressure and obtaining the output signal in form of an electrical capacitance. The capability of the software (Ansys/Multiphysics) to realize multi-field analysis will be used here in a very intensive way. Of major concern is the possibility to anticipate the influence of different liquid media on this category of pressure sensors developed using LTCC (Low Temperature Co-fired Ceramic).