• DocumentCode
    3637367
  • Title

    Customer-oriented product engineering of micro and nano devices

  • Author

    Tomasz Bieniek;Grzegorz Janczyk;Piotr Grabiec;Jerzy Szynka;Stanisław Kaliciński;Paweł Janus;Krzysztof Domański;Andrzej Sierakowski;Magdalena Ekwińska;Dariusz Szmigiel;Daniel Tomaszewski;Gisbert Hölzer;Gerold Schr&

  • Author_Institution
    Division of Silicon Microsystem and Nanostructure Technology, Warszawa, Poland
  • fYear
    2010
  • Firstpage
    81
  • Lastpage
    84
  • Abstract
    This paper discusses novel customer-oriented micro device product engineering methodology based on a real sample design of MEMS inertial sensor. The methodology supports multi-site product development. Virtual prototyping on a sample rapid virtual wafer run with extended customer support and feedback are also discussed along with presentation of selected set of software tools involved. Visualization and verification with the real process of the MEMS inertial sensor fabrication is also presented.
  • Keywords
    "Micromechanical devices","Fabrication","Product development","Corona","Readout electronics","Capacitance","Silicon"
  • Publisher
    ieee
  • Conference_Titel
    Mixed Design of Integrated Circuits and Systems (MIXDES), 2010 Proceedings of the 17th International Conference
  • Print_ISBN
    978-1-4244-7011-2
  • Type

    conf

  • Filename
    5551653
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3637367