Title :
Customer-oriented product engineering of micro and nano devices
Author :
Tomasz Bieniek;Grzegorz Janczyk;Piotr Grabiec;Jerzy Szynka;Stanisław Kaliciński;Paweł Janus;Krzysztof Domański;Andrzej Sierakowski;Magdalena Ekwińska;Dariusz Szmigiel;Daniel Tomaszewski;Gisbert Hölzer;Gerold Schr&
Author_Institution :
Division of Silicon Microsystem and Nanostructure Technology, Warszawa, Poland
Abstract :
This paper discusses novel customer-oriented micro device product engineering methodology based on a real sample design of MEMS inertial sensor. The methodology supports multi-site product development. Virtual prototyping on a sample rapid virtual wafer run with extended customer support and feedback are also discussed along with presentation of selected set of software tools involved. Visualization and verification with the real process of the MEMS inertial sensor fabrication is also presented.
Keywords :
"Micromechanical devices","Fabrication","Product development","Corona","Readout electronics","Capacitance","Silicon"
Conference_Titel :
Mixed Design of Integrated Circuits and Systems (MIXDES), 2010 Proceedings of the 17th International Conference
Print_ISBN :
978-1-4244-7011-2
