• DocumentCode
    3637447
  • Title

    Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

  • Author

    JL. Muñoz-Gamarra;E. Marigó;J. Giner;A. Uranga;F. Torres;N. Barniol

  • Author_Institution
    Department of Electronics Engineering, Universitat Autò
  • fYear
    2010
  • Firstpage
    415
  • Lastpage
    418
  • Abstract
    Experimental results of a pulsed mode electrostatic excitation on a Double Ended Tunning Fork (DETF) MEMS resonator at 11 MHz fabricated on a commercial standard 0.35um CMOS technology are described. Using small pulse widths of 4 ns, a ten percent power safe and a reduction of the MEMS non-linearities are achieved.
  • Keywords
    "Micromechanical devices","Oscillators","Optical resonators","CMOS integrated circuits","Resonant frequency","Frequency response","CMOS technology"
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium (FCS), 2010 IEEE International
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-6399-2
  • Type

    conf

  • DOI
    10.1109/FREQ.2010.5556300
  • Filename
    5556300
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3637447