Title :
Linear operation of a 11MHz CMOS-MEMS resonator
Author :
E Marigo;JL Munoz-Gamarra;J Giner;JL Lopez;F Torres;A Uranga;N Barniol;J Verd
Author_Institution :
Electronic Engineering Department, Universitat Autò
Abstract :
In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.
Keywords :
"Micromechanical devices","CMOS integrated circuits","Resonant frequency","Springs","Optical resonators","Softening","Phase measurement"
Conference_Titel :
Frequency Control Symposium (FCS), 2010 IEEE International
Print_ISBN :
978-1-4244-6399-2
DOI :
10.1109/FREQ.2010.5556351
