Title :
Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL
Author :
Hooman A. Davani;Christian Grasse;Benjamin Kögel;Petter Westbergh;Christian Gierl;Karolina Zogal;Sandro Jatta;Gerhard Böhm;Tobias Gründl;Peter Meissner;Anders Larsson;Markus-Christian Amann
Author_Institution :
Technical University Darmstadt, Germany Department of Microwaves and Optics, Germany
Abstract :
We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.
Keywords :
"Vertical cavity surface emitting lasers","Biomembranes","Distributed Bragg reflectors","Tuning","Apertures","Gallium arsenide"
Conference_Titel :
Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International
Print_ISBN :
978-1-4244-5683-3
DOI :
10.1109/ISLC.2010.5642777
