Title :
Pd-C film growN ON SiO2/Si and Si substrates
Author :
R. Diduszko;E. Czerwosz;E. Kowalska;M. Kozlowski;R. Nietubyć;F. Craciunoiu;M. Danila
Author_Institution :
Tele&
Abstract :
In this paper we present results of SEM, XRD and EXAFS studies of palladium-carbon nanostructural films prepared in two-steps method on pure and oxidized silicon substrates. Structural, topographical and morphological differences were found between films deposited on those substrates.
Keywords :
"Films","Silicon","Palladium","Substrates","X-ray scattering","Scanning electron microscopy","Carbon"
Conference_Titel :
Semiconductor Conference (CAS), 2010 International
Print_ISBN :
978-1-4244-5783-0
DOI :
10.1109/SMICND.2010.5649088
