• DocumentCode
    3639109
  • Title

    CNT film grown on nanoporous silicon

  • Author

    E. Czerwosz;E. Kowalska;M. Kozłowski;H. Wronka;F. Craciunoiu;M. Miu;A. Dinescu

  • Author_Institution
    Tele &
  • Volume
    1
  • fYear
    2010
  • Firstpage
    81
  • Lastpage
    84
  • Abstract
    Results of SEM characterization of CNT film grown on nanoporous silicon (NP-Si) plate covered with 2 step PVD/CVD layer are presented. SEM studies were performed for all stages of CNT film preparation process. It was found that the size of pores in NP-Si affects the final CNT film form and adhesion.
  • Keywords
    "Films","Silicon","Substrates","Mesoporous materials","Nickel","Carbon nanotubes","Scanning electron microscopy"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2010 International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-5783-0
  • Type

    conf

  • DOI
    10.1109/SMICND.2010.5650256
  • Filename
    5650256
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3639109