HEMT-SAW structures for chemical gas sensors in harsh environment

A growing thirst for highly sensitive and sufficiently selective sensors for extremely harsh conditions can be seen. This fact excludes the use of conventional sensing devices and gives a space for Surface Acoustic Wave sensors with monolithically-integrated electronics. We have chosen the AlGaN/GaN material as a suitable material due to its excellent chemical inertness and stability of piezoelectric parameters. In this paper we test the possible HEMT transistor/SAW transducer monolithic integration and propose the design of an oscillator based on SAW.