Study of ZnO films grown with different dopants - physical properties and their comparison

Transparent and electrically conductive (TCO) thin films of ZnO:Al, ZnO:Ga and ZnO:Sc, used in solar cells as well as optoelectronic devices, have been successfully deposited by rf magnetron sputter deposition using ZnO(98%) / X2O3(2%) ceramic target, X ∈{Al, Ga, Sc}, in the inert atmosphere of argon. In this contribution we focused on the changes in physical properties and their comparison in dependence on doping element. The XRD analyses, four probe measurements and UV-VIS spectroscopy were applied to investigate the structure (texture, lattice stress, grain size), electrical (resistivity) and optical (transmittance, optical band gap) properties of TCOs on the glass substrates.