• DocumentCode
    3639430
  • Title

    Effect of substrate temperature on oblique-angle sputtered ZnO:Ga thin films

  • Author

    I. Novotný;D. Kotorová;S. Flickyngerová;V. Tvarožek;L. Spiess;P. Schaaf;M. Netrvalová;P. Šutta

  • Author_Institution
    Department of Microelectronics, Slovak University of Technology, Ilkovič
  • fYear
    2010
  • Firstpage
    73
  • Lastpage
    76
  • Abstract
    A study of the effect of substrate temperature on oblique-angle sputtered galium-doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 × 10−3 Ωcm together with an increase of their optical transmittance over 90%.
  • Keywords
    "Substrates","Sputtering","Temperature","Conductivity","Optical films","Surface treatment"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
  • Print_ISBN
    978-1-4244-8574-1
  • Type

    conf

  • DOI
    10.1109/ASDAM.2010.5666346
  • Filename
    5666346
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3639430