Title :
Effect of substrate temperature on oblique-angle sputtered ZnO:Ga thin films
Author :
I. Novotný;D. Kotorová;S. Flickyngerová;V. Tvarožek;L. Spiess;P. Schaaf;M. Netrvalová;P. Šutta
Author_Institution :
Department of Microelectronics, Slovak University of Technology, Ilkovič
Abstract :
A study of the effect of substrate temperature on oblique-angle sputtered galium-doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 × 10−3 Ωcm together with an increase of their optical transmittance over 90%.
Keywords :
"Substrates","Sputtering","Temperature","Conductivity","Optical films","Surface treatment"
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Print_ISBN :
978-1-4244-8574-1
DOI :
10.1109/ASDAM.2010.5666346
