• DocumentCode
    3639783
  • Title

    Spin-On Glass as Low-Temperature Gate Insulator for Thin-Film Transistors

  • Author

    M. Dominguez Jimenez;P. Rosales-Quintero;A. Torres-Jacome;J. Molina-Reyes;M. Moreno-Moreno;F. J. De la Hidalga-Wade;C. Zuniga-Islas;W. Calleja-Arriaga

  • Author_Institution
    Dept. of Electron., Nat. Inst. for Astrophys., Opt. &
  • fYear
    2010
  • Firstpage
    741
  • Lastpage
    744
  • Abstract
    In this work, we report the characterization of Spin-On Glass (SOG) as low temperature gate insulator. The SOG film was deposited at a temperature of 200°C, which is compatible to use on flexible substrates. The optical and electrical characterization showed that the refractive index and dielectric constant are very close to those of thermally grown SiO2. We demonstrated the use of SOG as gate insulator, fabricating and characterizing a-SiGe: H TFTs.
  • Keywords
    "Logic gates","Insulators","Films","Thin film transistors","Refractive index","Threshold voltage","Semiconductor device measurement"
  • Publisher
    ieee
  • Conference_Titel
    Electronics, Robotics and Automotive Mechanics Conference (CERMA), 2010
  • Print_ISBN
    978-1-4244-8149-1
  • Type

    conf

  • DOI
    10.1109/CERMA.2010.87
  • Filename
    5692428
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3639783