Title :
Discussion group summary [5 summaries]
Abstract :
The interaction of the group led to an extensive discussion on the current issues pertaining to high-k dielectric stacks. The major points of the discussion are reviewed in five separate presentations included herein.
Conference_Titel :
Integrated Reliability Workshop Final Report (IRW), 2010 IEEE International
Print_ISBN :
978-1-4244-8521-5
DOI :
10.1109/IIRW.2010.5706517
