• DocumentCode
    3640516
  • Title

    Application Of Electron-beam Direct-writing Technology To High-density 0.8/spl mu/m CMOS ASICs And WSI Neurocomputers

  • Author

    M. Fujita;T. Takahashi;K. Shiozawa;Y. Kobayashi;H. Hayakawa;M. Kato;S. Mori;T. Kase

  • fYear
    1992
  • fDate
    6/14/1905 12:00:00 AM
  • Publisher
    ieee
  • Conference_Titel
    Custom Integrated Circuits Conference, 1992., Proceedings of the IEEE 1992
  • Print_ISBN
    0-7803-0246-X
  • Type

    conf

  • DOI
    10.1109/CICC.1992.591167
  • Filename
    5727312