Title :
Correction on “Effect of Temperature Variation and Packaging on SOI MEMS Inductor With DRIE Trench on Low-Resistivity Substrate” [Feb 14 400-407]
Author :
Bhattacharya, Avik ; Bhattacharyya, Tarun Kanti
Author_Institution :
Advanced Technology Development Centre, IIT Kharagpur, Kharagpur, India
Abstract :
In the above paper (ibid., vol. 61, no. 2, pp. 400-407, Feb. 2014), an equation contains a typographical error. The correct equation is presented here.
Keywords :
Inductors; Micromachining; Micromechanical devices; Silicon-on-insulator; Sputter etching; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2014.2366299
