• DocumentCode
    3642664
  • Title

    Comparison of air coplanar microprobes for on-wafer measurements at W-band

  • Author

    A. Pham;J. Laskar;S. Basu;J. Pence

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • Volume
    3
  • fYear
    1997
  • fDate
    6/19/1905 12:00:00 AM
  • Firstpage
    1659
  • Abstract
    We apply the on-wafer thru-reflect-line (TRL) and thru-reflect-match calibrations and measurements to evaluate and compare the performance of waveguide and coax fed microprobes at W-band. The results compare the repeatability, isolation, and performance of these probes.
  • Keywords
    "Calibration","Probes","Coplanar waveguides","Connectors","Coaxial components","Measurement standards","Impedance","Dielectric measurements","Millimeter wave technology","Surface waves"
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 1997., IEEE MTT-S International
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-3814-6
  • Type

    conf

  • DOI
    10.1109/MWSYM.1997.596717
  • Filename
    596717
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3642664