Title :
Adsorption-desorption phase noise in RF MEMS/NEMS resonators
Author :
Ivana Jokić;Miloš Frantlović;Zoran Djurić;Miroslav Dukić
Author_Institution :
ICTM - Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, Njegoš
Abstract :
In this paper the analysis is presented of the dependence of adsorption-desorption phase noise in MEMS/NEMS resonators of their resonant frequency, operating pressure and temperature. Results of the analysis are useful for optimization of parameters and operating conditions of such components in order to fulfill the requirements of existing and future telecommunication systems.
Keywords :
"Micromechanical devices","Resonant frequency","Phase noise","Nanoelectromechanical systems","Radio frequency","Fluctuations"
Conference_Titel :
Telecommunication in Modern Satellite Cable and Broadcasting Services (TELSIKS), 2011 10th International Conference on
Print_ISBN :
978-1-4577-2018-5
DOI :
10.1109/TELSKS.2011.6112017
