• DocumentCode
    3645927
  • Title

    Application nanoindenter as nanolithography tool

  • Author

    Maria Ramiączek-Krasowska;Adam Szyszka;Regina Paszkiewicz;Jaroslav Lukes

  • Author_Institution
    Wroclaw University of Technology, Faculty of Microsysem Electronics and Photonics, Janiszewskiego 11/17 Street, 50-372 Wroclaw, Poland
  • fYear
    2011
  • fDate
    7/1/2011 12:00:00 AM
  • Firstpage
    77
  • Lastpage
    79
  • Abstract
    In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.
  • Keywords
    "Force","Resists","Gold","Microscopy","Photonics","Europe"
  • Publisher
    ieee
  • Conference_Titel
    Students and Young Scientists Workshop, 2011 International
  • ISSN
    1939-4381
  • Print_ISBN
    978-1-4577-1651-5
  • Type

    conf

  • DOI
    10.1109/STYSW.2011.6155847
  • Filename
    6155847
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3645927