DocumentCode
3646863
Title
Planar interconnects to 3D interconnects
Author
Sitaram R. Arkalgud
Author_Institution
SEMATECH, USA
fYear
2012
fDate
4/1/2012 12:00:00 AM
Firstpage
1
Lastpage
1
Abstract
Summary form only given. Envisioning greater functionality, higher performance and lower power consumption, the semiconductor industry is introducing the first products with 3D interconnects into volume manufacturing. This presentation will trace the transition from planar to 3D interconnects by beginning with the key issues which confronted the scaling of 2D interconnects. The second part of the talk will cover the current status and the enablement of the supply chain, The final part of this presentation will discuss the potential trends for 3D IC in the future years.
Keywords
Abstracts
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications (VLSI-TSA), 2012 International Symposium on
ISSN
1930-8868
Print_ISBN
978-1-4577-2083-3
Type
conf
DOI
10.1109/VLSI-TSA.2012.6210111
Filename
6210111
Link To Document