• DocumentCode
    3646863
  • Title

    Planar interconnects to 3D interconnects

  • Author

    Sitaram R. Arkalgud

  • Author_Institution
    SEMATECH, USA
  • fYear
    2012
  • fDate
    4/1/2012 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given. Envisioning greater functionality, higher performance and lower power consumption, the semiconductor industry is introducing the first products with 3D interconnects into volume manufacturing. This presentation will trace the transition from planar to 3D interconnects by beginning with the key issues which confronted the scaling of 2D interconnects. The second part of the talk will cover the current status and the enablement of the supply chain, The final part of this presentation will discuss the potential trends for 3D IC in the future years.
  • Keywords
    Abstracts
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, Systems, and Applications (VLSI-TSA), 2012 International Symposium on
  • ISSN
    1930-8868
  • Print_ISBN
    978-1-4577-2083-3
  • Type

    conf

  • DOI
    10.1109/VLSI-TSA.2012.6210111
  • Filename
    6210111