Title :
Helium sensing using multipurpose thermopile-based MEMS devices
Author :
D. Randjelović;Ž. Lazić;M. Popović;M. Matić
Author_Institution :
IHTM-IMTM University of Belgrade, Njegoš
fDate :
5/1/2012 12:00:00 AM
Abstract :
In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.
Keywords :
"Thermal sensors","Helium","Gas detectors","Atmospheric modeling","Atmospheric measurements","Thermal conductivity"
Conference_Titel :
Microelectronics (MIEL), 2012 28th International Conference on
Print_ISBN :
978-1-4673-0237-1
DOI :
10.1109/MIEL.2012.6222819