DocumentCode :
3646997
Title :
Helium sensing using multipurpose thermopile-based MEMS devices
Author :
D. Randjelović;Ž. Lazić;M. Popović;M. Matić
Author_Institution :
IHTM-IMTM University of Belgrade, Njegoš
fYear :
2012
fDate :
5/1/2012 12:00:00 AM
Firstpage :
147
Lastpage :
150
Abstract :
In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.
Keywords :
"Thermal sensors","Helium","Gas detectors","Atmospheric modeling","Atmospheric measurements","Thermal conductivity"
Publisher :
ieee
Conference_Titel :
Microelectronics (MIEL), 2012 28th International Conference on
ISSN :
pending
Print_ISBN :
978-1-4673-0237-1
Type :
conf
DOI :
10.1109/MIEL.2012.6222819
Filename :
6222819
Link To Document :
بازگشت