DocumentCode
3647001
Title
MEMS reliability
Author
I. Stanimirović;Z. Stanimirović
Author_Institution
IRITEL A.D. Belgrade, Batajnič
fYear
2012
fDate
5/1/2012 12:00:00 AM
Firstpage
173
Lastpage
175
Abstract
Over the last few years MEMS technology has demonstrated high potential for realizing essential components for modern engineering systems. However, our knowledge of reliability issues relevant to MEMS growing is still insufficient. This paper provides a brief overview of MEMS technologies and generic structures as well as failure mechanisms that are commonly encountered.
Keywords
"Micromechanical devices","Reliability","Packaging","Substrates","Surface treatment","Stress"
Publisher
ieee
Conference_Titel
Microelectronics (MIEL), 2012 28th International Conference on
ISSN
pending
Print_ISBN
978-1-4673-0237-1
Type
conf
DOI
10.1109/MIEL.2012.6222826
Filename
6222826
Link To Document