Title :
Low loss waveguide integration within a thin-SOI CMOS foundry
Author :
Jason S. Orcutt;Benjamin Moss;Chen Sun;Jonathan Leu;Michael Georgas;Stevan Urosevic;Hanqing Li;Jie Sun;Matthew Weaver;Eugen Zgraggen;Rajeev J. Ram;Vladimir Stojanovic;Jeffrey Shainline;Milos Popovic
Author_Institution :
Department of Electrical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA
fDate :
5/1/2012 12:00:00 AM
Abstract :
By requiring zero process changes and by complying with established electronic circuit design rules, photonic devices formed with 3dB/cm waveguides were fabricated alongside transistors achieving 4ps stage delay in a 45nm thin-SOI CMOS foundry.
Keywords :
"Photonics","CMOS integrated circuits","Silicon","Foundries","Optical waveguides","CMOS technology","Transistors"
Conference_Titel :
Optical Interconnects Conference, 2012 IEEE
Print_ISBN :
978-1-4577-1620-1
DOI :
10.1109/OIC.2012.6224465
