Title :
Submicron silicon waveguides and optical splitters for mid-infrared applications
Author :
Milan M. Milošević;Milos Nedeljkovic;Taha M. Ben Masaud;Ehsan Jaberansary;Harold M. H. Chong;Graham T. Reed;Goran Z. Mashanovich
Author_Institution :
Advanced Technology Institute, Faculty of Engineering and Physical Sciences, University of Surrey, Guildford, GU2 7XH, UK
Abstract :
We report on the design, fabrication and characterisation of submicron silicon-on-insulator strip waveguides at a 3.74 μm wavelength. Experimental results for 1×2 multi-mode interference splitters are also given.
Keywords :
"Optical waveguides","Silicon","Propagation losses","Strips","Photonics","Optimized production technology","Optical device fabrication"
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324071
