Title :
Picosecond laser machining in the bulk of transparent dielectrics: Critical comparison with fs-laser direct writing
Author :
Costantino Corbari;Audrey Champion;Mindaugas Gecevičius;Martynas Beresna;Matthieu Lancry;Bertrand Poumellec;Yves Bellouard;Peter G. Kazansky
Author_Institution :
Optoelectronics Research Centre, University of Southam pton, SO 17 1B J, United Kingdom
fDate :
5/1/2012 12:00:00 AM
Abstract :
Picosecond lasers for bulk machining of transparent dielectrics are assessed as an alternative to fs-lasers. Nanogratings and micro-channels by selective etching are demonstrated. Scattering and inhomogeneous etching are challenges yet to be solved.
Keywords :
"Etching","Measurement by laser beam","Silicon compounds","Chemical lasers","Writing","Glass"
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2012 Conference on
Print_ISBN :
978-1-4673-1839-6
DOI :
10.1364/CLEO_AT.2012.ATu3L.2
