• DocumentCode
    3648665
  • Title

    Picosecond laser machining in the bulk of transparent dielectrics: Critical comparison with fs-laser direct writing

  • Author

    Costantino Corbari;Audrey Champion;Mindaugas Gecevičius;Martynas Beresna;Matthieu Lancry;Bertrand Poumellec;Yves Bellouard;Peter G. Kazansky

  • Author_Institution
    Optoelectronics Research Centre, University of Southam pton, SO 17 1B J, United Kingdom
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Picosecond lasers for bulk machining of transparent dielectrics are assessed as an alternative to fs-lasers. Nanogratings and micro-channels by selective etching are demonstrated. Scattering and inhomogeneous etching are challenges yet to be solved.
  • Keywords
    "Etching","Measurement by laser beam","Silicon compounds","Chemical lasers","Writing","Glass"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • ISSN
    2160-8989
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • DOI
    10.1364/CLEO_AT.2012.ATu3L.2
  • Filename
    6325384
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3648665