• DocumentCode
    3648674
  • Title

    Angle-etched free-standing photonic crystal nanobeam cavities in single-crystal diamond

  • Author

    Michael J. Burek;Brendan J. Shields;Nathalie de Leon;Birgit M. Hausmann;Yiwen Chu;Qimin Quan;Mikhail Lukin;Marko Lončar

  • Author_Institution
    School of Engineering and Applied Sciences, Harvard University, 29 Oxford Street, Cambridge, MA 02138, USA
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A bulk nanomachining technique to realize suspended photonic structures in diamond is presented. The developed fabrication methodology, employs oxygen plasma etching and yields free-standing nanobeam waveguides and photonic crystal cavities.
  • Keywords
    "Diamond-like carbon","Cavity resonators","Photonic crystals","Photonics","Etching","Fabrication","Optical waveguides"
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • ISSN
    2160-8989
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • DOI
    10.1364/CLEO_SI.2012.CM1M.2
  • Filename
    6325642
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3648674