Title :
High frequency circuits manufactured by micromachining techniques
Author :
B. Milovanovic;V. Markovic;D. Stojkovic
Author_Institution :
Fac. of Electron. Eng., Nis Univ., Serbia
Abstract :
Micromachining technology is successfully used for high frequency applications, especially for millimeter and submillimeter circuits. The aim of this paper is to shed some light on this new and very promising field and give a survey of some recent developments. A variety of planar transmission lines, antennas, tuning elements, etc., manufactured by micromachining techniques, are demonstrated.
Keywords :
"Frequency","Manufacturing","Micromachining","Biomembranes","Dielectric losses","Planar transmission lines","Propagation losses","VHF circuits","Micromechanical devices","Semiconductor materials"
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.632893
