• DocumentCode
    3648759
  • Title

    Compensation of thermocouple reference junction temperature variation by a silicon temperature sensor

  • Author

    M. Zlatanovic;M. Dukic;I. Popovic;Z. Zirojevic

  • Author_Institution
    Fac. of Electr. Eng., Belgrade Univ., Serbia
  • Volume
    2
  • fYear
    1997
  • Firstpage
    557
  • Abstract
    A new method for the reference junction temperature compensation of a K type thermocouple based thermometer by using a PTC silicon resistive sensor KTY 10 is described. The thermometer is intended for the temperature measurement in the range from 20/spl deg/C to 600/spl deg/C during plasma deposition and plasma nitriding processes, but it can be successfully used in other applications where the reference junction temperature is varied during the measurement.
  • Keywords
    "Temperature sensors","Silicon","Plasma temperature","Temperature distribution","Thermal sensors","Instruments","Sensor phenomena and characterization","Temperature measurement","Plasma applications","Plasma measurements"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1997. Proceedings., 1997 21st International Conference on
  • Print_ISBN
    0-7803-3664-X
  • Type

    conf

  • DOI
    10.1109/ICMEL.1997.632904
  • Filename
    632904
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3648759